Scanning Electron Microscope Denoising (SEMD™)

Scanning Electron Microscopy (SEM) imaging being the widely used tool for LER metrology suffers from the presence of noise that degrades measurement accuracy. To solve this issue without damaging the measured pattern, we have developed and trained a Convolutional Neural Network (CNN) for SEM image denoising. Our SEMD software receives as input a noisy SEM image and provides as output the denoised image of the pattern.