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Our paper “Challenges in LER/CDU metrology of DSA structures: placement error and cross-line correlations” (http://spie.org/Publications/Proceedings/Paper/10.1117/12.2230849)  has been selected as the winner of the Diana Nyyssonen Award for Best Paper at SPIE Metrology, Inspection, and Process Control. The presentation of the award will take place at the beginning of the conference on Monday, February 27, 2017.

Nanometrisis awarded Diana Nyyssonen Award for Best Paper at SPIE Metrology, Inspection, and Process Control