“Multifractal analysis of line-edge roughness”,
March 2018,
DOI: 10.1117/12.2306508,
Conference: Metrology, Inspection, and Process Control for Microlithography XXXII
Multifractal analysis of line-edge roughness
“Multifractal analysis of line-edge roughness”,
March 2018,
DOI: 10.1117/12.2306508,
Conference: Metrology, Inspection, and Process Control for Microlithography XXXII