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Multifractal analysis of line-edge roughness

You are here: Nanometrisis > Publications > Multifractal analysis of line-edge roughness

“Multifractal analysis of line-edge roughness”,
March 2018,
DOI: 10.1117/12.2306508,
Conference: Metrology, Inspection, and Process Control for Microlithography XXXII

Multifractal analysis of line-edge roughness
nanometrisis March 31, 2018November 1, 2019 Publications
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