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Line edge roughness measurement through SEM images: effects of image digitization and their mitigation

You are here: Nanometrisis > Publications > Line edge roughness measurement through SEM images: effects of image digitization and their mitigation

“Line edge roughness measurement through SEM images: effects of image digitization and their mitigation”
September 2017,
DOI: 10.1117/12.2294060,
Conference: 33rd European Mask and Lithography Conference

Line edge roughness measurement through SEM images: effects of image digitization and their mitigation
nanometrisis September 1, 2017November 1, 2019 Publications
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