“Deep learning nanometrology of line edge roughness”,
March 2019,
DOI: 10.1117/12.2520941,
Conference: Metrology, Inspection, and Process Control for Microlithography XXXIII
Deep learning nanometrology of line edge roughness
“Deep learning nanometrology of line edge roughness”,
March 2019,
DOI: 10.1117/12.2520941,
Conference: Metrology, Inspection, and Process Control for Microlithography XXXIII