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Publications

You are here: Nanometrisis > Publications

Multifractal analysis of line-edge roughness

nanometrisis March 31, 2018November 1, 2019 Publications

“Multifractal analysis of line-edge roughness”, March 2018, DOI: 10.1117/12.2306508, Conference: Metrology, Inspection, and Process Control for Microlithography XXXII

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Allowable SEM noise for unbiased LER measurement

nanometrisis March 1, 2018November 1, 2019 Publications

“Allowable SEM noise for unbiased LER measurement”, March 2018, DOI: 10.1117/12.2306509, Conference: Metrology, Inspection, and Process Control for Microlithography XXXII

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Computational nanometrology of line-edge roughness: noise effects, cross-line correlations and the role of etch transfer

nanometrisis March 1, 2018November 1, 2019 Publications

“Computational nanometrology of line-edge roughness: noise effects, cross-line correlations and the role of etch transfer”, March 2018, DOI: 10.1117/12.2306282, Conference: Advanced Etch Technology for Nanopatterning VII

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Line edge roughness measurement through SEM images: effects of image digitization and their mitigation

nanometrisis September 1, 2017November 1, 2019 Publications

“Line edge roughness measurement through SEM images: effects of image digitization and their mitigation” September 2017, DOI: 10.1117/12.2294060, Conference: 33rd European Mask and Lithography Conference

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Challenges in line edge roughness metrology in directed self-Assembly lithography: Placement errors and cross-line correlations

nanometrisis April 1, 2017November 1, 2019 Publications

“Challenges in line edge roughness metrology in directed self-Assembly lithography: Placement errors and cross-line correlations” April 2017, Journal of Micro/ Nanolithography, MEMS, and MOEMS 16(2):024001, DOI: 10.1117/1.JMM.16.2.024001

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Computational nanometrology of nanostructures: the challenge of spatial complexity

nanometrisis January 1, 2017November 1, 2019 Publications

“Computational nanometrology of nanostructures: the challenge of spatial complexity”, January 2017, DOI: 10.1051/metrology/201713001, Conference: 18th International Congress of Metrology

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Advances on statistical physics of complex systems

nanometrisis June 1, 2016November 1, 2019 Publications

“Advances on statistical physics of complex systems”, June 2016, International Journal of Modern Physics B 30(15), DOI: 10.1142/S0217979215020038

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