Nanometrisis awarded Diana Nyyssonen Award for Best Paper at SPIE Metrology, Inspection, and Process Control

Our paper “Challenges in LER/CDU metrology of DSA structures: placement error and cross-line correlations” (http://spie.org/Publications/Proceedings/Paper/10.1117/12.2230849)  has been selected as the winner of the Diana Nyyssonen Award for Best Paper at SPIE Metrology, Inspection, and Process Control. The presentation of the award will…